A novel mechano-optical sensor based on read-out with a Si3N4 grated waveguide

Grated Waveguide Optical Cavity as a Compact Sensor for Sub-nanometre Cantilever Deflections

We propose a novel and highly sensitive integrated read-out scheme, capable of detecting sub-nanometre deflections of a cantilever in close proximity to a grated waveguide structure. We discuss modelling results for an SiO2 cantilever to be integrated with an optical cavity defined by a grated Si3N4 waveguide.

Cantilever deflection read-out with a grated waveguide optical cavity

We propose a novel and highly sensitive mechanooptical device for gas-sensing through nano-displacements, based on micro-cantilevers, supplied with a selective gas absorbing layer (Pd), suspended above a Si3N4 grated waveguide (GWG). We present the simulation and preliminary experimental results, which indicate the sensing of nanodisplacements, an important intermediate step for the gas-sensing...

Numerical investigation and optimization of a mechano - optical sensor based on a grated waveguide optical cavity

Grated Waveguide-based Optical Cavities as Compact Sensors for Sub-nanometre Cantilever Deflections, and Small Refractive-index Changes

The paper reports on theoretical and experimental results of integrated optical (IO) cavities defined by grated waveguides in Si3N4 and Si, for the accurate detection of cantilever deflection and bulk index changes. Microcantilever-based sensors can be used to detect molecular adsorption, which causes changes in the surface stress [1], leading to deflection of the cantilever. We propose a novel...

Fabrication of microcantilever-based IO grated waveguide sensors for detection of nano-displacements

We propose a novel and highly sensitive integrated read-out scheme, capable of detecting sub-nanometre deflections of a cantilever in close proximity to a grated waveguide structure. A very compact and stable sensor element can be realized by monolithically integrating a microcantilever structure with the grated waveguide (GWG), using conventional layer deposition and sacrificial layer etching ...